Title

Numerical simulation of the radiation effects in graphite-strip zone-melting recrystallization of thin silicon films

Document Type

Conference Proceeding

Publication Title

American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD

Publication Date

12-1-1989

Abstract

A two-dimensional finite difference numerical simulation of the temperature distribution during graphite-strip zone-melting recrystallization of thin silicon films was developed. The model takes into account the non-linearities of radiative heating and cooling, phase change effects, and the varying reflectivity, emissivity and thermal conductivity of silicon upon melting. Radiation shape factors, temperature profiles and melt-zone widths for the critical radiation parameters (graphite strip height, width and distance from the strip to the wafer) were obtained and presented in graphical form. These results can be used for process enhancement and optimization in zone-melting.

Volume

123

First Page

211

Last Page

217

ISSN

02725673

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