Thermal effects in plasma treatment of patterned PDMS for bonding stacked channels

Document Type

Conference Proceeding

Publication Title

Materials Research Society Symposium - Proceedings

Publication Date

1-1-2003

Abstract

This paper presents the results of a study to identify the effects of preheating for plasma oxidation (ashing) of patterned Polydimethylsiloxane (PDMS) for Bio-MEMS applications. PDMS creates an irreversible seal to itself as well as strong seals with glass, silicon, and silicon nitride. This process activates the surface by producing hydroxyl groups that last for several minutes to allow bonding. Several channels can be stacked to create 3D systems for microfluidic applications using PDMS alone or in combination with other materials to develop hybrid systems. For PDMS, bonding temperatures typically occur at room temperature. This research investigates the effect of preheating the materials prior to ashing. The investigators successfully demonstrate good bonding of PDMS to slides with a work adhesion on the order of 100 mJm -2. Preheating the samples at 65°C results in significant increase in work adhesion depending on mixture. The effects of processing temperature and chemical components on bond quality and work of adhesion are reported.

Volume

782

First Page

125

Last Page

130

DOI

10.1557/proc-782-a5.5

ISSN

02729172

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