MEMS as temperature sensors during high temperature processing

Authors

H. Tada, Tufts University
A. R. Abramson, Tufts University
P. Nieva, Tufts University
P. Zavracky, Tufts University
Ioannis N. Miaoulis, Tufts University; Roger Williams UniversityFollow
Peter Y. Wong, Tufts University; Roger Williams UniversityFollow

Document Type

Conference Proceeding

Publication Title

Materials Research Society Symposium - Proceedings

Publication Date

1-1-1998

Abstract

Microelectromechanical systems (MEMS) technology is being used in developing innovative temperature sensor (T-MEMS), which allow an ex-situ examination of the maximum temperature reached during a thermal process by creating a permanent change in structure at high temperature. The performance of the device relies on the thermophysical properties of the materials. Through careful experimental design and accurate modeling of their structural behavior, the high-temperature material properties can be determined using the T-MEMS and calibrated furnaces.

Volume

518

First Page

161

Last Page

166

DOI

10.1557/proc-518-161

Recommended Citation

Tada, H., Abramson, A., Nieva, P., Zavracky, P., Miaoulis, I., & Wong, P. (1998). MEMS as temperature sensors during high temperature processing. Materials Research Society Symposium - Proceedings, 518, 161-166. https://doi.org/10.1557/proc-518-161

ISSN

02729172