MEMS as temperature sensors during high temperature processing
Materials Research Society Symposium - Proceedings
Microelectromechanical systems (MEMS) technology is being used in developing innovative temperature sensor (T-MEMS), which allow an ex-situ examination of the maximum temperature reached during a thermal process by creating a permanent change in structure at high temperature. The performance of the device relies on the thermophysical properties of the materials. Through careful experimental design and accurate modeling of their structural behavior, the high-temperature material properties can be determined using the T-MEMS and calibrated furnaces.
Tada, H., Abramson, A., Nieva, P., Zavracky, P., Miaoulis, I., & Wong, P. (1998). MEMS as temperature sensors during high temperature processing. Materials Research Society Symposium - Proceedings, 518, 161-166. https://doi.org/10.1557/proc-518-161